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1100℃Three-Zone Split Tube Furnace with 15“ OD Quartz tube, Flange and ElectricalLid Actuator(40''L Heating Zone)OTF-1100X-15-III

產品型號：1100℃Three-Zone Split Tube Furnace with 15“ OD Quartz tube, Flange and ElectricalLid Actuator(40''L Heating Zone)OTF-1100X-15-III

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產品簡介 / Introduction

1100°C Three-Zone Split Tube Furnace with 15“ OD Quartz tube, Flange and Electrical Lid Actuator (40''L Heating Zone) - OTF-1100X-15-III

Specification

Furnace structure

Double layer steel casing with air cooling. The surface temperature of the case is ＜ 70°C.Refractory fibrous alumina insulation liner for maximum energy saving.Heating element: NiCrAl Resistance WireTwo fibrous ceramic tube blocks are included for blocking heat radiation from inside tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating) This furnace can be used as annealing or diffusion furnace for 8" wafer use a quartz boat at related product below (for 11'' O.D tube only)Electrical lid actuator provides easy amp; hassle free lid opening when seen through the tube chamber or tube replacement is needed.


Structure schematic	11" ceramic tube。 Click to order spare	Holding 8" wafer	Electrical Lid Actuator

Heating zone

Total heating zone length 1000mm (40")Three zones: 330 mm + 330 mm + 330mm (12" per zone)Constant temperature zone: 600 mm (if three zones are in the same temperature within+/- 5°C)

Working temperature

Max heating temperature: 1100℃Max heating amp; cooling rate: 10°C/minSiC heating elements, total 36 pcs

Temperature control

Three digital controllers with PID/self-tuning functions and 30 segments programmable. Thermocouple: three K type thermocouples (one for each zone)Control accuracy: +/- 1°CSoftware for PC control is available as optional ( click picture on the left to order )

European Temperature Controllers (optional upgrade)

1 heating channel1 programs of 8 or 24 segmentAlarm Relay: Form 'A' and Form ‘C’ built-in Digital Communications: RS485Temperature Accuracy: ± 0.1oCRecipes:Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.

Fused quartz tube

15" O.Dx14.6" ID quartz tube with 73" Length, please select tube size in the option barHigh purity quart tube, please click the bottom left picture to view.Warning: quartz tube is fragile, please handle with care. Warranty does not cover broken tube by use

Vacuum sealing amp; Flange

A pair of stainless steel vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via a heavy-duty mechanical pump.Left Side Flange: stainless steel needle valves, and 1/4" barbed hose fitting.Right Side Flange: KF40 vacuum port with a vacuum gauge. KF-40 Vacuum Right-Angle Valve is optional for easy connection to KF40 bellows and pump.One 1/4" OD thermal couple insert port is built on the right flange for easy temperature calibration.

Optionals

The tube furnace should be calibrated regularly to maintain the temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at extra cost The complete calibration kit includes (click the underline to see details):One 48"L ( 1/4"OD) K type calibration thermocoupleOne Omega temperature calibrator5 feet long thermocouple power extension wireYou may consider ordering turbopump for hi-vacuum up to 10-5 torr ( click pic below right to order )4'' ~ 8'' large size quartz boats

Rated Voltage

Three Phase, 208V AC, 50/60 Hz （ 3 phase 380V is optional）AWG 8# Power cord is included (without plug)

Power consumption

Max. 20KW

Product Dimension

Net weight

500kg

Warranty

One year limited warranty on electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty)You may order replacement quartz tube at the link below

Compliance

CE CertifiedUL / MET / CSA Certification is available upon request, additional charges will applyThe temperature controller is MET and CE Certified

Installation Video

NOTE

In order to obtain accurate temperature inside the tube furnace,calibration of temperature is require before use, please click here to learnHow to set up ceramic tube and vacuum flange for STR-Tube furnace

Operation Instructions

Warning

Tube furnaces with quartz tubes are designed for using under vacuum and low pressure ＜ 0.2 bar / 3 psi / 0.02 MPa or 0.12 MPa (absolute pressure). Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.Click here to learnthe installation of a gas regulator.Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°CThe flow rate for gases should be limited to＜200 SCCM (or 200ml/min) for reducing thermal shocks to the tube

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