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1100℃Three-Zone Split Tube Furnace with 8'' or 11＂ Quartz tube, Flange and ElectricalLid Actuator(40''L Heating Zone)OTF-1100X-11-III

產品型號：1100℃Three-Zone Split Tube Furnace with 8'' or 11＂ Quartz tube, Flange and ElectricalLid Actuator(40''L Heating Zone)OTF-1100X-11-III

電爐類型：高溫電爐系列

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電爐系列：賽特瑞電爐

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產品簡介 / Introduction

1100°C Three-Zone Split Tube Furnace with 8'' or 11" Quartz tube, Flange and Electrical Lid Actuator (40''L Heating Zone) - OTF-1100X-11-III

Specification

Furnace structure

、Double layer steel casing with air cooling. The surface temperature of the case is ＜ 70°C. 、Refractory fibrous alumina insulation liner for maximum energy saving. 、Heating element: NiCrAl Resistance Wire 、Two fibrous ceramic tube blocks are included for blocking heat radiation from inside tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating) 、This furnace can be used as annealing or diffusion furnace for 8" wafer use a quartz boat at related product below (for 11'' O.D tube only) 、Electrical lid actuator provides easy amp; hassle free lid opening when seen through the tube chamber or tube replacement is needed.


Structure schematic	11" ceramic tube。 Click to order spare	Holding 8" wafer	Electrical Lid Actuator

Heating zone

、Total heating zone length 100mm (40") 、Three zones: 300 mm + 300 mm + 300mm (12" per zone) 、Constant temperature zone length : 350 mm (if three zones are in the same temperature within +/- 3°C) 、Cross section Temperature tolerance： +/- 3°C

Working temperature

、Max heating temperature: 1100℃ 、Max heating amp; cooling rate: 10°C/min 、SiC heating elements, total 36 pcs

Temperature control

、Three digital controllers with PID/self-tuning functions and 30 segments programmable. 、Thermocouple: three K type thermocouples (one for each zone) Control accuracy: +/- 1°C 、Software for PC control is available as optional ( click picture on the left to order )

European Temperature Controllers (optional upgrade)

、1 heating channel 、1 programs of 8 or 24 segment 、Alarm Relay: Form 'A' and Form ‘C’ built-in 、Digital Communications: RS485 、Temperature Accuracy: ± 0.1oC 、Recipes:Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.

Fused quartz tube

、Can accomodate 8'' or 11" O.D quartz tube with 71" Length, please select tube size in the option bar 、High purity quart tube, please click the bottom left picture to view. 、Warning: quartz tube is fragile, please handle with care. Warranty does not cover broken tube by useNote: for the needs of higher temperature operation upto 1250C, please consider our FeCrAl alloy tube. Please contact us for more details. Click bottom right picture to view.

Vacuum sealing amp; Flange

、A pair of stainless steel vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via a heavy-duty mechanical pump. 、Left Side Flange: stainless steel needle valves, and 1/4" barbed hose fitting. 、Right Side Flange: KF40 vacuum port with a vacuum gauge. KF-40 Vacuum Right-Angle Valve is optional for easy connection to KF40 bellows and pump. 、One 1/4" OD thermal couple insert port is built on the right flange for easy temperature calibration.

Optionals

、The tube furnace should be calibrated regularly to maintain the temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at extra cost The complete calibration kit includes (click the underline to see details): o One 48"L ( 1/4"OD) K type calibration thermocouple o One Omega temperature calibrator o 5 feet long thermocouple power extension wire 、You may consider to order turbo pump for hi-vacuum upto 10-5 torr ( click pic below right to order ) 、4'' ~ 8'' large size quartz boats

Rated Voltage

、Three Phase, 208V AC, 50/60 Hz （ 3 phase 380V is optional）、AWG 8# Power cord is included (without plug)

Power consumption

Max. 20KW (100A breaker required)

Product Dimension

2000 Lx765Wx1130 H mm

Net weight

300kg

Shipping dimension

85"x40"x70"

Shipping weight

1200 lbs

Warranty

、One year limited warranty on electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty) 、You may order replacement quartz tube at the link below

Laptop, software amp; WiFi Control(Optional)

、Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. 、 Temperature Control System (EQ-MTS01)enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for STR-furnaces. 、A wireless remote control provides up to 300 meters operating range. 、Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
、Note: The software is only compatible with Yudian Temperature Controller

Compliance

、CE Certified 、UL / MET / CSA Certification is available upon request, additional charges will apply 、Temperature controller is MET and CE Certified

NOTE

、In order to obtain accurate temperature inside the tube furnace,calibration of temperature is require before use, please click here to learn 、How to set up ceramic tube and vacuum flange for STR-Tube furnace

Operation Instructions

Warning

、Tube furnaces with quartz tubes are designed for using under vacuum and low pressure ＜ 0.2 bar / 3 psi / 0.02 MPa or 0.12 MPa (absolute pressure). 、Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.Click here to learnthe installation of a gas regulator. 、Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 、The flow rate for gases should be limited to＜200 SCCM (or 200ml/min) for reducing thermal shocks to the tube

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