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1200oC Max. Two-zone Microwave Plasma Enhanced CVD(MPECVD) Rotary Tube FurnaceOTF-1200X-R-II-MPECVD

產品型號：1200oC Max. Two-zone Microwave Plasma Enhanced CVD(MPECVD) Rotary Tube FurnaceOTF-1200X-R-II-MPECVD

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產品簡介 / Introduction

1200oC Max. Two-zone Microwave Plasma Enhanced CVD (MPECVD) Rotary Tube Furnace - OTF-1200X-R-II-MPECVD

Specification

Split Tube Furnace	Input voltage: 110/220 VAC, single-phase. 50/60 Hz.Input power: 1.2 kW.Maximum working temperature: 1200 ℃(＜ 60 min).Continuously working temperature: 1100 °C.Maximum heating rate: 10 ℃/min.30 segments programmable precision digital temperature controller.Dual 4" (100 mm) heating zone.Constant Temperature zone: 100 mm within ±2 ℃if two zones at same temperature.
Temperature Controller	Proportional integral derivative (PID) control.Built in temperature and thermocouple failure protection.Default D89 BC communication port.Temperature accuracy: ±1 °C.Heating elements: Fe-Cr-Al alloy doped by Mo.RS485 Communications Port.Advanced Temperature Control (Optional) Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the software kit. You may upgrade the temperature controller to the Eurotherm 3204 Temperature Controllerwhich is fully compatible with LabVIEW. This package includes a Eurotherm 3204 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3204 temperature controller.
Tube Description	2" fused quartz processing tube with mixing blade in center.Tube length: 1100 mm.Rotation speed: 0 ~ 5 rpm. Contact us for other tube sizes options.
Microwave Magnetron	Input voltage: 110 VAC, single-phase.Input power: 600 W (Optional: 1200W, 2100W and 3500W microwave generators are available upon request, additional cost will be applied)Frequency: 2.45 GHz Continuously working time: 30 mins.Air cooling.Equipped with an aluminum protective shield and an AC fan to minimize the microwave leak.
Pressure Sensor	Working voltage: 110 ~240 VAC, single phase.Anti-corrosive capacitance diaphragm gauge(3.8 × 10^-5 ~ 1.125 × 10^3 Torr).
Vacuum Pump	Working voltage: 110 VAC/60 Hz or 220 VAC 50/60 Hz, single phase.Working power: 375 W.156 L/min rotary vane vacuum pump.Vacuum capability: 10 ^ -3 Torr.
Product Dimensions	Product dimension: 1500 × 500 × 600 mm.Furnace: 640 × 300 × 400 mm.Microwave generator: 360 × 300 × 600 mm.
Warranty	One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
Laptop, software amp; WiFi Control (Optional)	Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. Temperature Control System (EQ-MTS01)enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for STR-furnaces.A wireless remote control provides up to 300 meters operating range.Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.Note: The software is only compatible with Yudian Temperature Controller
Compliance	CE CertifiedNRTLor CSA certification ia available at extra cost.（ please click marks below to learn details )
Compliance	Patten Number：ZL-2011-2-0355777.1
Operation Instruction
WarningClick here to learnthe installation of a gas regulator	The tube furnaces with quartz tube are designed for using under vacuum and low pressure ＜ 0.2 bars / 3 psi / 0.02 MpaAttention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.Click here to learnthe installation of a gas regulator.Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°CThe flow rate for gasses should be limited to＜200 SCCM (or 200ml/min) for reducing thermal shocks to the tubeSTR-reserves right to modify PECVD design at any time without notice but promise that quality will meet the specifications above

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