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5＂ Rotary CVD Tube Furnace with Three Heating Zones at 1200℃Max.OTF-1200X-III-R5L

產品型號：5＂ Rotary CVD Tube Furnace with Three Heating Zones at 1200℃Max.OTF-1200X-III-R5L

電爐類型：高溫電爐系列

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電爐系列：賽特瑞電爐

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產品簡介 / Introduction

5" Rotary CVD Tube Furnace with Three Heating Zones at 1200°C Max. - OTF-1200X-III-R5L

Specification

urnace Construction

Double shell casing with three cooling fansHigh purity Alumina fibrous insulation for max. energy efficiencyDCGearmotor drives quartz tube with variable speed 0 - 10 RPMThe furnace can be electrically tilted up to 30° CSplit cover enables faster cooling and easy operation.All electric components are UL or Met recognized and ready to pass any safety test worldwide

Heating Zone length

Three zones: (600mm, 24" in total)Zone 1: 150 mm Zone 2: 300mm Zone 3: 150 mm Constant temperature zone: 450 mm within +/-2oC if two zones are at the same temperature.

Processing tube amp; Flange

Fused quartz tube (one is included)Dimension: 130 mm O.D.x120 mm I.D.x1200 mm L + 60 OD mm （two ends )Click the pics below to see details about the furnace's processing tube Four Mixing Blades DimensionOne pair of 60mm SS sealing flange with needle valves and a rotatable gas connector is included for immediate use

Gas Fittings

Inlet Fitting: Elbow Push-in connector for 6mm O.D tube; Outlet Fitting: Elbow Push-in connector for 12mm O.D tube

Max. Working Temperature

1100℃for continuously

1200℃Max for ＜ 1 hours

Temperature Controllers

Three PID digital temperature controllers with 30 programmable segmentsRS485 port is built in to connect PC for remote control

Temperature Uniformity

+/- 1℃in heating Zone

Thermocouple

Three Omega K type 3mm ODx6" Lwith high temperature tolerance (220°C) connector

Tube rotating Speed

0 - 10 RPM variable (Gear reduction ratio 1:150, torque 10Nm)

Furnace tilt angle

0 - 30°

Chamber pressure

10^-2torr

Production yield

2 kg per batch

Power

4 KW Max

Voltage

208 - 240V single phase (30 A Breaker required)

Warranty amp; Certificate

One year limited warranty (consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, replacements are available at related products below.)

Laptop, software amp; WiFi Control (Optional)

Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. Temperature Control System (EQ-MTS01)enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for STR-furnaces.A wireless remote control provides up to 300 meters operating range.Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.Note: The software is only compatible with Yudian Temperature Controller

Compliance

CE CertifiedNRTLor CSA certification is available upon request at extra cost.

Furnace dimension

	With Lid Open		With Lid Closed
Tilt	At 0°	34°	0°	34°
Length	60"	60"	60"	60"
Width	35"	35"	24"	24"
Height	66.5"	74"	58"	68"

Net Weight

130 kg

Shipping Weight amp; Dimension

600 lbs48"x40"x80"

Operation Video

Application Notes

The concept of continuous power feeding and processing can be realized by the use of Magnetic Fluid Sealed Swivel Coupling with Volumetric Feeder and Rotary Furnace. Please view the assembling approach diagram and video in below. For CVD coating, you may choose our multi channel Gas delivery system as Pic below right For CVD coating, you may choose our multi-channel Gas delivery system as Pic below right.Ref Article： Scalable synthesis of silicon-nanolayer-embedded graphite for high-energy lithium-ion batteries

Warnings

The tube furnaces with quartz tube are designed for using under vacuum and low pressure ＜ 0.2 bar / 3 psi / 0.02 MPaAttention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.Click here to learnthe installation of a gas regulator.Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

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