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5＂ Rotary CVD Tube Furnace with 3 Heating Zones and 4 Channel Gas Delivery System at 1200℃Max.OTF-1200X-III-R5L-LVC4

產品型號：5＂ Rotary CVD Tube Furnace with 3 Heating Zones and 4 Channel Gas Delivery System at 1200℃Max.OTF-1200X-III-R5L-LVC4

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產品簡介 / Introduction

5" Rotary CVD Tube Furnace with 3 Heating Zones and 4 Channel Gas Delivery System at 1200°C Max. - OTF-1200X-III-R5L-LVC4

Specification

Furnace Construction

Double shell casing with three cooling fansHigh purity Alumina fibrous insulation for max. energy efficiencyDC Gear motor drives quartz tube with variable speed 0 - 10 RPMThe furnace can be electrically tilted up to 30°Split cover enables faster cooling and easy operation.All electric components are UL or Met recognized and ready to pass any safety test worldwide

Heating Zone length

Three zones: (600mm, 24" in total)Zone 1: 150 mm ( 6")Zone 2: 300mm ( 12")Zone 3: 150 mm ( 6")Constant temperature zone: 450 mm within +/- 2 oC if two zones are at the same temperature.

Processing tube amp; Flange

Fused quartz tube (one is included)Dimension: 130 mm O.D.x120 mm I.D.x1200 mm L + 60 OD mm （two ends )Click the pics below to see details about the furnace's processing tube Four Mixing Blades DimensionOne pair of 60mm SS sealing flange with needle valves and the rotatable gas connector is included for immediate use

Gas Fittings

Inlet Fitting: Elbow Push-in connector for 6mm O.D tube; Outlet Fitting: Elbow Push-in connector for 12mm O.D tube

Max. Working Temperature

1100℃for continuously

1200℃Max for ＜ 1 hours

Optional Temperature Controllers

Three PID digital temperature controllers with 30 programmable segmentsRS485 port is built in to connect PC for remote controlPlease click the picture to the left for ordering the software and chip at extra cost.

Temperature Uniformity

+/- 1℃in heating Zone

Thermocouple

Three Omega K type 3mm ODx6" Lwith high-temperature tolerance (220°C) connector

Tube rotating Speed

0 - 10 RPM variable

Furnace tilt angle

0 - 30°

Chamber pressure

10^-2 torr

Production yield

2 kg per batch

Vacuum and Filters

One heavy-duty mechanical vacuum pump with ExhaustFilter are included One cold vacuum trap is included to avoid CVD contaminating the vacuum pump.

Gas Delivery System

Four channel precision gas mixing and delivery system with Touch Screen is included for 1-4 kinds of gasses CVDNote: If using flammable gas in the system, It must be placed in a fume hood with the suitable gas detector. You must get approved by professional safety personnel.

Power

4 KW Max

Voltage

208 - 240V single phase (30 A Breaker required)

Warranty amp; Certificate

One year limited warranty (consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, replacements are available at related products below.)

Laptop, software amp; WiFi Control (Optional)

Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. Temperature Control System (EQ-MTS01)enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for STR-furnaces.A wireless remote control provides up to 300 meters operating range.Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.Note: software is only compatible with Yudian Temperature Controller

Compliance

CE CertifiedNRTLor CSA certification is available at extra cost.（ please click marks below to learn details )

Furnace dimension

	With Lid Open		With Lid Closed
Tilt	At 0°	34°	0°	34°
Length	60"	60"	60"	60"
Width	35"	35"	24"	24"
Height	66.5"	74"	58"	68"

Net Weight

130 kg

Shipping Weight amp; Dimension

600 lbs48"x40"x80"

Operation Video

Application Notes

The continuous power feeding and processing can be realized by the use of Magnetic Fluid Sealed Swivel Coupling in line with Volumetric Feeder and Rotary Furnace. Please view the assembling approach diagram and video in below. Rotary Tube Furnaces are used for the quick and easy production of laboratory-scale samples with excellent homogeneity for Ramp;D and quality control.Ref Article： Scalable synthesis of silicon-nanolayer-embedded graphite for high-energy lithium-ion batteries

Warnings

The tube furnace with quartz tube is designed for use under vacuum and low pressure ＜ 0.2 bars / 3 psi Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.Click here to learnthe installation of a gas regulator.Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

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