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RTP Furnace with 4＂ ID Quartz Tube _Digital Vacuum Gauge up to 1100oCOTF-1200X-RTP-4

產品型號：RTP Furnace with 4＂ ID Quartz Tube _Digital Vacuum Gauge up to 1100oCOTF-1200X-RTP-4

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產品簡介 / Introduction

RTP Furnace with 4" ID Quartz Tube & Digital Vacuum Gauge up to 1100oC - OTF-1200X-RTP-4

、Please view "Grains and grain boundaries in single-layer graphene atomic patchwork quilts" published by NATURE 09718, Jan 5, 2011, in which an STR-RTP furnace was used. 、Please view "Improved control in elimination of white impurities on graphene by chemical vapordeposition (CVD)" published by AIP Advances8, 125325 (2018), in which an STR-RTP furnace was used. 、Please view "Thin-film Sb2Se3 photovoltaics with oriented one-dimensional ribbons and benign grain boundaries" published by NATURE Photonics, in which an STR-tube furnace was used for Thin-film Sb2Se3 photovoltaics Rapid Thermal Evaporation processing.OTF-1200X-RTP-4 is a compact rapid thermal processing tube furnace with a 4" I.D. processing quartz tube and vacuum flanges. It is designed for annealing semiconductor wafers or solar cells with diameters up to 3". OTF-1200X-4-RTP is heated by 8 units of 1KW halogen light with a max. the heating rate of 50oC/second. 30 segment precision temperature controller with +/-1oC accuracy is built into the furnace to allow for heating, dwelling, and cooling at various steps. RS485 port and control software are included to make monitoring the temperature profile via PC while simultaneously running furnace possible. This furnace also can be modifiedinto anRTE, CSS or HPCVD furnace( see below application note )SPECIFICATIONS

Furnace Structure	、Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C. 、High purity fibrous alumina insulation for maximum energy saving. 、Split cover with Interlock protection, cut the power if lid open during furnace heating process.
Power Input	208-240 AC, 50/60 Hz single phase, 9 KW Max. (60A breaker required)
Heating Elements	、8 pcs 1Kw Halogen light tube, ( Dia. =10mm, L=300mm, Heated Length =200mm) 、Standard working life: 2000 hrs. ( depends on heating rate ) 、The Halogen light tube is consumable. Please click picture left to order spare one
Heating Zone	12" length with 4" constant temperature zone within +/-5oC uniformity
Working Temperature	、1100oC Max. for ＜ 10 minutes 、1000oC Max. for ＜ 20 minutes (Note: if running longer time, furnace case will gt; 100oC, must use fan cooling case from outside ) 、800oC Max. for ＜ 120 minutes 、600oC Max. for Continuous
Max. Heating Rate	50oC/sec
Cooling Rate	、Max. Cooling: 60oC/min (Under vacuum: 200 mtorr), 117oC/min (under atmospheric pressure) 、Lowest Cooling: 10 oC / minute
Thermocouple	K type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath
Temperature Controller	、FA-YD518P-AGtemperature controller is included. 、Proportional–integral–derivative control (PID control) and auto-tune function 、30 segments programmed with ramping, cooling and dwelling steps 、Built-in over-temperature alarm and thermocouple failure alarm 、+/- 1 oC temperature control accuracy 、Default DB9 PC communication port 、MET Certified
Temperature controller (optional)	、Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the software kit. 、You may upgrade the temperature controller to the Eurotherm 32H8 Temperature Controllerwhich includes a communication cable (RS485 - USB) and a software CD. Click the pic above to view the full spec of Eurotherm 32H8 temperature controller.
Quartz Tube amp; Sample Holder	、Quart Tube Size: 4.33" O.Dx4.05" I.Dx16.2" Length. ( click pic-1 to order replacement ) 、One 3" Diameter AlN sample holderfor annealing samples up to 3" Dia is included. AlN has a very high thermal conductivity which provides the best temperature uniformity in the sample area. 、Optional: 3'' O.D Thick Graphite Substratecan be used as an alternative to AIN plate. (please click pic-3 below to order) 、Optional: Graphite Crucible:87 mm ODx71 mm IDx12 mm Height with lidis designed for 3" sample holder, can also be modified into an RTE, CSS or HPCVD furnacewith a graphite crucible coated with SiC. 、The sample holder is removable from the flange for using the RTP furnace for other purposes.
Vacuum Flange	、KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves, and water cooling jacket. 、Only requires water cooling in long running times at temperatures gt; 600^oC. 、Circulating water rate: 0.5 m³/hr. 、The slide-out flange provides an easier way of loading, unloading the samples and other specific process needed. 、Insert-able thermal-couple for accurate measurement.
Vacuum Pump (optional)	、EQ-FYP vacuum pump is recommended for this furnace. The ultimate vacuum pressure in this system can be 10^-3 torr. Vacuum bellows and clamps are included in this package. Click here for the spec of EQ-FYP vacuum pump. 、Click here to view other models of pump and package.
Water Cooling (optional)	、Cooling water is required. 、Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. ＜ 25oC; pressure gt; 25 PSI. 、We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water. 、Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000oC ~ 1100oC with tap water, otherwise O-ring may melt.
Flow-meter	One flow meter is installed on the front panel for adjusting gas flow from 16 - 160 ml/min
Vacuum Gauge	Digital vacuum gauge with a measurement range from 10^-4to 1000 Torr is installed on the furnace.
Vacuum Pressure amp; Gas Fitting	、Pressure can reach 50 mtorr by using mechanical vacuum pump with KF25 adapter 、Pressure can reach 10^-4torr by molecular pump with KF25 adapter
Dimensions	、Flange closed: 760mm(L) X 330mm(W) X 530mm(H) / Flange opened: 1200mm(L) X 330mm(W) X 530mm(H)
Net Weight	70 kg (150 lbs)
Warranty	One year limited manufacturer warranty with lifetime support (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products below).
Laptop, software amp; WiFi Control(Optional)	、Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. 、 Temperature Control System (EQ- MTS01)enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for STR-furnaces. 、A wireless remote control provides up to 300 meters operating range. 、Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information. 、Note: The software is only compatible with Yudian Temperature Controller
Compliance	Please select the certificate in options bar:CE Certificate amp; UL/CSA ready: CE approval, ready to pass UL/CSA certificate UL certircate - UL apprval (UL 61010), at extra cost
Compliance	、Patten Number: ZL-2011-2-0077168.4 SINCE 2011-3-22
Optional	、You may combine the RTP furnace with high vacuum station or gas livery system as vacuum furnace or CVD system. Click pictures below to see details 、For achieving fast cooling rate (＜ 10oC/second), you may choose RTP furnace with sliding rail. Please click the picture below to see details. 、You may order pressure control module ( click picture below- right ) to keep chamber at constant pressure
Application Notes	、Tube furnaces with quartz tubes are designed for using under vacuum and low pressure ＜ 0.2 bars / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°CThe flow rate for gasses should be limited to＜200 SCCM (or 200ml/min) for reducing thermal shocks to the tube 、Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.Click here to learnthe installation of a gas regulator. 、This furnace also can bemodified into an RTE, CSS or HPCVD furnacewith a graphite crucible coated with SiC ( click Pic-left for detail how to set up an RTE processing by DIY ) 、After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.
Operation Instructions

STANDARD PACKAGE

Item No.	Description	Quantity	Quick Links
EQ-CVM-211	Digital Vacuum Gauge Up to 10^-4Torr	1
EQ-KF-Valve-D25	Vacuum Ball Valve with Dual KF-D25 port	1
RTP-ACC-01	Sample Holder for RTP furnace	1
AIN-Holder	Aluminum Nitride Substrate for RTP Furnace's Sample Holder	1
EQ-QZTube-RTP	Quartz Tube: 4.33" O.Dx4.05" I.Dx16.2" Length for RTP Tube Furnace	1
RTP-ACC-02	Quartz heat shield disk	4
EQ-WCT-12	20ft.polyurethane tube O.D. 12mm I.D. 8mm W.P. 100PSI	1
EQ-SOR-110	Inner Rubber O-Ring 110 mm Diameter (4 pcs preinstalled)	8 in total
EQ-SOR-128	Outer Rubber O-Ring 128 mm Diameter (2 pcs preinstalled)	4 in total
EQ-RTP-Halogen-light	Halogen light	8
STR-WATER-CONN	Water Hose Connector	2
EQ-KF-Clamp-D25	Quick Clamp with Rubber O-Ring for KF-D25 Vacuum adapter	2
EQ-TC-K-Cali-12S-DT-LD	K-Type Thermocouple	1

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